Versatile Automated Semiconductor Testing and Characterization

Author

Danny Loren Parker

Issuing Body

Mississippi State University

Advisor

Mazzola, Michael S.

Committee Member

Casady, Jeffrey B.

Committee Member

Koshka, Yaroslav

Date of Degree

12-14-2001

Document Type

Graduate Thesis - Open Access

Major

Electrical Engineering

Degree Name

Master of Science

College

College of Engineering

Department

Department of Electrical and Computer Engineering

Abstract

High-voltage SiC Schottky barrier diodes have been fabricated with 1mm square contacts. The SBD?s were fabricated using both an argon implant and a field plate overlap for edge termination. The Versatile Automated Semiconductor Testing and Characterization system was designed to fully test and characterize these devices with as little human interaction as possible. The focus of this thesis is to discuss the usefulness of the VASTAC system. Emphasis is placed on it?s versatility derived from a modular design allowing the system to perform a variety of tests. Specifically, the testing and characterization of silicon carbide Schottky Barrier Diodes will be discussed in relation to the systems performance, cost, and the time it takes to test a wafer.

URI

https://hdl.handle.net/11668/19194

Recommended Citation

Parker, Danny Loren, "Versatile Automated Semiconductor Testing and Characterization" (2001). Theses and Dissertations. 4960.
https://scholarsjunction.msstate.edu/td/4960